Thin Film and Surface Modification Business Unit

Ion Implant System

Technical Information

Ion Implant System

This is a newly created technology for surface modification with Ion Implant without dimensional change. This provides the hardness increase, lower friction and heat resistance etc.

Case History Ion Implant

This was effective to longer life of cold press dies, cutting tool, bending dies etc.

Process Principal

Product Features of Ion Implant System

  1. TiB2 (Titanium diboride): shows both conductive and corrosion resistant properties, and provide a high hardness level of HV2700
  2. MoS2 (Molybdenum disulfide): used in solid lubricating materials due to its low friction coefficient and lubricating properties
  3. ZrB2 (Zirconium diboride): shows superior hardness and heat resistance, that are well performed especially in high temperature resistant materials for metals and steel related products.
  4. hBN (hexagonal boron nitride) → cBN (cubic boron nitride): these are changed stoichiometric.

Consignment

The NAGATA SEIKI Thin Film Business Unit not only sells ion implant machines but also provides implant for service under contract.

Case Histories

  • Dies and mold for cold press
  • Increased yield
  • Reducing of shut-off time

Specification

Target TiB2 Titanium Diboride
ZrB2 Zirconium Diboride
cBN Cubic Boron Nitride
Effective coating area 100×550mm
Carrier gas Ar,N2,Xe,Kr

Download catalog: Ion Implant Machine

Ion Implant Machine Catalog PDF (220KB)

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