Ion Implant System
Technical Information
Ion Implant System
This is a newly created technology for surface modification with Ion Implant without dimensional change. This provides the hardness increase, lower friction and heat resistance etc.

Case History Ion Implant
This was effective to longer life of cold press dies, cutting tool, bending dies etc.
Process Principal

Product Features of Ion Implant System
- TiB2 (Titanium diboride): shows both conductive and corrosion resistant properties, and provide a high hardness level of HV2700
- MoS2 (Molybdenum disulfide): used in solid lubricating materials due to its low friction coefficient and lubricating properties
- ZrB2 (Zirconium diboride): shows superior hardness and heat resistance, that are well performed especially in high temperature resistant materials for metals and steel related products.
- hBN (hexagonal boron nitride) → cBN (cubic boron nitride): these are changed stoichiometric.
Consignment
The NAGATA SEIKI Thin Film Business Unit not only sells ion implant machines but also provides implant for service under contract.
Case Histories
- Dies and mold for cold press
- Increased yield
- Reducing of shut-off time
Specification
| Target | TiB2 Titanium Diboride ZrB2 Zirconium Diboride cBN Cubic Boron Nitride |
|---|---|
| Effective coating area | 100×550mm |
| Carrier gas | Ar,N2,Xe,Kr |
